Sputtering Ion pump pst series

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pst Series

Sputter ion pumps are one type of pump used to create　ultra-high vacuum, and are used in many analyzers and accelerators.
ULVAC’s acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.

features

Ultimate pressure in the 10-9 Pa order (achieved with test dome complying with ISO standards)
Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
(compared with the ULVAC’s conventional pumps)
High pumping speed attained the ultra-high vacuum
Pumping down to ultra-high vacuum in a short period of time
Top-notch pumping characteristics in ultra and extremely-high vacuum (discharging maintained down to the ultra-high vacuum)

applications

Accelerators
Electron microscopes
Analyzers

specifications

Evacuation speed to 1 x 10-7(reproduced evacuation speed)

N₂:	0.03m³/s(CU ・ AU)
	0.02m³/s(1×10^-7Pa)

Final pressure

10^-9Pa order

Operation pressure

<8.0×10^-3Pa(recommended value)
(Maximum operation pressure 1×10^-2Pa)
*Using GST-07L controller

Volume

約6.7 X 10^-4m³approx

Number of pump elements

CX cell (x 1), AX cell (x 1)

Connection flange model

UFC070

Applied voltage

DC+7.5kV

Standard bake-out temperature

250°C

Weight

約9.5KG approx

External dimensions　W×D×H

103×183×187 mm

Company Profile

Sells and provides customer support for vacuum equipments and components

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contact us

ULVAC Singapore Pte.Ltd.
India Branch

301, Tara Tycoon 12-13-97, Tarnaka Secunderabad – 500 017, India