The DPG-2/DPG-4 are 2 kW/4 kW DC power generators for sputtering.
Repeatability is excellent because of high control accuracy.
| Model | DPG-2 | DPG-4 | |
| Input specification | Rated input voltage | AC208V/220V | |
| Input voltage fluctuation range | 180 to 242VAC | ||
| Phase, frequency | Three phase, 50/60Hz | ||
| Input capacity | 3.5kVA | 6.2kVA | |
| Output specification | Maximum rated power | 2kW | 4Kw |
| Rated current | 5A | 10A | |
| Rated voltage | 800V | ||
| Output polarity | Negative polarity | ||
| Abnormal discharge control | Shutoff by inverter stop or stop by resonance | ||
| Control | Control method | Constant power control (P control) / Constant current control (I control) /Constant voltage control (V control) | |
| Control precision | ±1％ of set point (In our prescriptive resistance value.) | ||
| Control compensation range | Constant power control, 1 to 100％ of rated power value | ||
| Parallel operation | Nothing | ||
| Interface | Analog/Degital,RS-232C or RS-485 | ||
| Cooling method | Forced air-cooling | ||
| Dimension（W×D×H） | 241mm×610mm×133mm（excluding protrusions） | ||
| Weight | 15kg | ||
| Applicable standard | CE/SEMI F47/RoHS | ||
Ambient operating temperature 5℃ ～ 40℃（no condensation）
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.