Small Capacity DC Power Supply DCS Series

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DCS-Series

As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications.
Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.

features

Improvement in output regulation (Operates in 1％ to 100％ of rated)
Wide range of output without tap changing
Two types of arc detection function are equipped
Countermeasure for extraneous noise by isolation (option)
Selectable from three types of operation mode (power / current / voltage)
Floating output up to +100V

applications

For Al, Ni and other metal sputtering processes

specifications

Model		DCS0052B
Maximum output power		500W
Output range	Power	5W～500W
	Voltage	80V～800V
	Current	0.0012A～1.25A
External dimensions (WDH) mm		240 x 450 x 99
Weight		9kg

Company Profile

Sells and provides customer support for vacuum equipments and components

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contact us

ULVAC Singapore Pte.Ltd.
India Branch

301, Tara Tycoon 12-13-97, Tarnaka Secunderabad – 500 017, India