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High Pressure Process Qulee BGM2-Series

BGM2-Series

“Qulee” (pronounced as “KLEE”), is ULVAC’s latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).

features

  • Excellent in Cost Performance
    Suitable for RGA application
  • Communication interface
    Ethernet compatible
  • Integrated Display
    No need for PC
  • Simple Operation
    “One Click” function
  • Bake Out
    Max 120℃ (248℉) high temperature bake (250℃ (482℉) when sensors are removed)
  • Degas Function
    Electron bombard degas
  • Protection and Maintenance Features
    Ion source and secondary electron multiplier protection maintenance help function
  • Various Leak Tests are Available
    Helium leak test, air leak test, leak up
  • Total Pressure Measurement
    Capable of total pressure measurement
  • Qulee QCS is Included
    This software is included and compatible with (Windows 7/8/10)
  • Applicable Standard
    Conforms with CE

applications

  • Residual gas analysis for organic electro luminescence
  • Residual gas monitoring for PV, FPD, and semiconductor manufacturing system
  • Residual gas analysis in PVD system and vacuum deposition
  • Residual gas analysis for high vacuum pumping equipment, etc.
  • Residual gas analysis for freeze drying system
  • Various types of gas analysis for research and development

specifications

Resolution M/△M=1M(10% P.H.)

ModelBGM2-101BGM2-201BGM2-102BGM2-202
Mass filter typeQuadrupole
Mass range1～100 amu1～200 amu1～100 amu1～200 amu
Detector typeFaraday cupEM tube
Faraday cup
Sensitivity10-7A/Pa4A/Pa
Minimum detectable partial pressure10-8Pa10-12Pa
Maximum operating pressure1×10-2Pa
Total pressure functionCapable/10-2 ～ 10-5Pa
One Click functionCapable /He/H2O/N2/O2/Any gas
One Click leak test functionCapable
Power inputDC24V±10％　50W
Maximum sensor operating temperature120℃ (248℉)
Maximum bakeout temperature (electronics removed)250℃ (482℉)
Operating temperature range10 to 40℃ (50 to 104℉)
SoftwareQulee QCS Ver.4.0 later (Windows 7/8/10)
Applicable standardCE
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Company Profile
Sells and provides customer support for vacuum equipments and components
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contact us

ULVAC Singapore Pte.Ltd.
India Branch
301, Tara Tycoon 12-13-97, Tarnaka Secunderabad – 500 017, India
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