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Cluster-type Sputtrering System SME-200E

SME-200E Series

SME-200E is cluster type Sputtering system for research and development and production purpose.

features

  • Substrate size up to Φ200mm.
  • Process chamber up to three process chamber can be equipped.
  • Available for various application-specific process modules.
  • Substrate heating mechanism, simultaneous deposition and revolved deposition are available.

applications

  • R&D
  • Production purpose
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Company Profile
Sells and provides customer support for vacuum equipments and components
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contact us

ULVAC Singapore Pte.Ltd.
India Branch
301, Tara Tycoon 12-13-97, Tarnaka Secunderabad – 500 017, India
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