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High-energy Ion Implanter

SOPHI-400-series

SOPHI-400 is a cluster type, high-energy ion implanter applicable to 2400 keV.

features

  • Cluster type
  • Thin wafers Compatible.
  • Parallel beam
  • High energy: 2400 keV
  • Wafer size: up to 200mm

applications

  • Power device manufacturing process, IGBT
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Sells and provides customer support for vacuum equipments and components
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ULVAC Singapore Pte.Ltd.
India Branch
301, Tara Tycoon 12-13-97, Tarnaka Secunderabad – 500 017, India
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