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vacuum pump

ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.

dry vacuum pump

MS series
ls series
gr series
lr/ur/hr series
cr series
rda series
dat series
da/dap series
dtc series
dau/dtu series
dop series
dis/disl series
mda series
eco-shock

oil rotary vacuum pump

vd series
vs series
pvd series
pks series
VS650A/750A series
gld series
ghd series
gcd series
g series

mechanical booster pump

pmb series
pmb-c series
PRC series
mbs series

oil diffusion pump

ulk series
pfl series
pbl series

turbo molecular pump

utm-fw/fh series
utm-mi series
utm-b series
ytp series
desktop with ytp

sputtering ion pump

pst series
pst controller

cryo pump

u- series
Company Profile
Sells and provides customer support for vacuum equipments and components
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ULVAC Singapore Pte.Ltd.
India Branch
301, Tara Tycoon 12-13-97, Tarnaka Secunderabad – 500 017, India
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