ENTRONTM-EX makes it possible to combine various stateof-the-art processes such as PVD, CVD, ALD and realizes simple and robust In-Situ process.
MLXTM-3000N meets customer’s complicated requests by superior process flexibility and controllability, and excellent cost performance.
The ULDiS series is the digital sputtering system that has enhanced the Meta Mode and realized the high-quality optical filters and coatings.
SRH Series is production system for deposition of metallic films for power device, WL-CSP, or UBM or similar application.
SME-200E is cluster type Sputtering system for research and development and production purpose.
Load-lock type Sputtering System CS 200 is for research & development and small production application.
Compact sputtering system is available for research and development of multi layer thin film, compound materials or other devices, using automatic process operation by PC.
It is possible to arrange for various module conbination; Atmospheric cassette, Single piece, Atmospheric transfer, Vaccum transfer. Compact design integrated with control unit.
Gemini is to equip with a variety of different process modules on the same transfer core which makes reducing spare parts by adopting the same common parts as much as possible as well as improves usability with the same operation panel between these different modules. This improves further efficiency for manufacturing process of advanced electronics.
Vertical batch-type sputter systems. Series models include the SV-200 disk stamper model, and carousel types for large-volume substrate processing.
Batch-type Sputtering System SX series is for batch type sputtering system for research & development and small production application.
The SMD Series are single-substrate sputtering systems for deposition of films such as metal films and ITO films. ULVAC has delivered a large number of these systems, for use in a wide range of production environments.
The SCH Series are horizontal in-line sputtering systems for deposition of transparent conductive films and other metal films. They can be used to depositi films such as back conatct and barrier layers in solar cell production lines.