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DC POWER SUPPLY DPG Series

The DPG are 2kW-30kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.

Small Capacity DC Power Supply DPG-2 /DPG -4Series

The DPG-2/DPG-4 are 2 kW/4 kW DC power generators for sputtering. Repeatability is excellent because of high control accuracy.

Features

  • High control precision
    High precision of ±1% of set value even in a low power region of below 10％.</li
  • Wide accuracy guarantee
    Guarantee the wide range power control from 1 to 100％.
  • Light-weight/space-saving
    Light-weight and space-saving design with excellent installation flexibility.
  • Requires no cooling water
    Forced air cooling, requires no cooling water.
  • High reliability
    Our accumulated knowledge as an equipment manufacturer has been reflected in the design.
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Large Capacity DC Power Supply DPG-10/DPG-20 Series

The DPG-10/DPG-20 are 10kW/20kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.

Features

  • Leight-weight/ Space-saving
    Light-weight and space-saving design with excellent installation flexibility.
  • Selectable output voltage range
    We feature a lineup with 800V specifications in addition 1000V specification.
  • Extensive arc handling
    Extensive arc control methods familiar with plasma.
  • Requires no cooling water
    Forced air cooling, require cooling water.
  • Can be equipped with a high-speed arc interruption circuit
    Achieves low arc energy as standard. Can also be equipped with a high-speed arc shutoff circuit as an option.
  • Can be equipped with a flexible parallel operation function
    DPG-10, DPG-20: With the optional parallel operation function, 10kW and 20kW can be combined to allow up to 12 units to work together in parallel operation. (240kW max)
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Large Capacity DC Power Supply DPG-30 Series

30 kW high impedance specification DC power supply for sputtering.

Features

  • Extremely low ark energy by utilizing an optional high-speed arc shutoff circuit.
    It contributes to high productivity and improves manufacturing yield.
  • 1200V output with high-impedance load resistance.
  • EtherCAT communication is available.
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Sells and provides customer support for vacuum equipments and components
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ULVAC Singapore Pte.Ltd.
India Branch
301, Tara Tycoon 12-13-97, Tarnaka Secunderabad – 500 017, India
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