The DPG-10/DPG-20 are 10kW/20kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.
| Model | DPG-10-AM | DPG-10H-AM | DPG-10-4AM | DPG-20-AM | DPG-20H-AM | DPG-20-4AM | |
| Input specification | Rated input voltage | 3-Phase 187 to 229VAC | 3-Phase AC342 to 440V | 3-Phase 187 to 229VAC | 3-Phase AC342 to 440V | ||
| Input capacity | 13.5kVA or less | 25kVA or less | |||||
| Output specification | Maximum rated power | 10kW | 20kW | ||||
| Rated current | 25A | 18A | 25A | 50A | 40A | 50A | |
| Rated voltage | -800V | -1000V | -800V | -800V | -1000V | -800V | |
| Ignition voltage | -1500V | ||||||
| Abnormal discharge control | Shutoff by inverter stop or high-speed arc shutoff circuit*1 when abnormal discharge is detected | ||||||
| Control | Control method | Constant power control (P control)/constant current control (I control)/constant voltage control (V control) | |||||
| Control precision | Constant power control (P Control)：±0.5% or less of the rated output or ±1％ of the set value, whichever is larger. Constant current control (I Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger. Constant voltage control (V Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger. | ||||||
| Control warranty scope | Constant power control, 10 to 100％ of rated power value | ||||||
| Extenal interface | analog/digital,RS-232C or 485 | ||||||
| Parallel operation | Up to 12units can be controlled by master/slave communication | ||||||
| Cooling method | Forced air-cooling | ||||||
| Dimension W×D×H | 483×630×133mm (excluding protrusions) | ||||||
| Weight | 29kg | 36kg | |||||
| Applicable standard | CE/ SEMI F47/ RoHS | ||||||