A pressure sensor unit that is adopting a semiconductor type thin-film element. By this can measure near to the atmospheric pressure (Gauge pressure : -100kPa～10kPa) with high accuracy. To be compatible for a high vacuum pressure SUS316L is adopted.
features
Suitable for atmosphere pressure check： Pressure standard is corresponding with gauge pressure and a high accuracy measurement is capable
Corresponding to the continuous use of high vacuum pressure process： Semiconductor type thin-film element (SUS316L) is adopted to be compatible for a high
Measurement output signal： Pressure is set to DC 0 to 5V Log out signal as a standard
Rotate Generator： Compatible in wide for DC12 to 24V
Quick coupling standard： Adopting a NW16 port
applications
To confirm the atmospheric pressure of PV, FPD, SEMICONDUCTOR system which contain high vacuum components.
To confirm the atmospheric pressure of Industrial Vacuum Equipment like furnace systems which contain high vacuum components.
To the vacuum system that require the high accuracy measurement of -100kPa～0kPa Gauge pressure (Absolute pressure：10+4～10+5Pa )
