Screw Type Dry Vacuum Pump LS Series

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LS Series

High pumping speed and Low power consumption. Model is selectable with the optimum pumping speed according to the application.

features

High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced
ECO-SHOCK technology realizes low power consumption. (C Type)
　Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C)
Built-in silencer achieves the noise level 61dB(A) or less.
Low running-cost
　No shaft sealing gas.
　※Purge gas is available with L Type.
4 Pumping speed120~1200m3/h Class ※With mecanical booster pump
　Model is selectable with the optimum pumping speed according to the application.

applications

C Type : Clean process (LS***A-C)
　　　Feature : Low power consumption model (with built-in ECO-SHOCK)
　　　Applications : For clean process such as air and N2
　　　　　　　　　　 Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc.

　L Type : Light process (LS***A-L)
　　　Features : Light process model (with surface treatment and purge function)
　　　Applications : For light process such as steam and volatile liquid medicine
　　　　　　　　　　Vacuum drying / Freeze drying / Ashing / General industrial use etc.

specifications

Company Profile

Sells and provides customer support for vacuum equipments and components

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contact us

ULVAC Singapore Pte.Ltd.
India Branch

301, Tara Tycoon 12-13-97, Tarnaka Secunderabad – 500 017, India