ULK-type oil diffusion pump is a compact high vacuum pump designed with high critical back pressure.
It is used in a wide range of applications, from research to manufacturing line.
ULVAC’s oil diffusion ejector pumps are generally used in industrial processes to provide high pumping speed. They are particularly well-suited for use in metallurgy, plastic coating and chemical manufacturing, where large quantities of gas have to be pumped away as quickly as possible.
PFL-type oil diffusion pump is designed and manufactured based on our extensive research and manufacturing experience.
It is used in many high-vacuum production facilities, and its practical performance is highly appreciated.