PFL-type oil diffusion pump is designed and manufactured based on our extensive research and manufacturing experience.
It is used in many high-vacuum production facilities, and its practical performance is highly appreciated.
| Model | PFL-22 | PFL-36 | PFL-52 | ||||||||
| Pumping speed(L/sec) | 10000 | 34000 | 70000 | ||||||||
| Ultimate pressure(Pa)*1 | 3.0×10-4 | ||||||||||
| Maxium forepressure(Pa) | 16 | 6.7 | 16 | ||||||||
| Heating up time(min) | 40 | 60 | 60 | ||||||||
| Oil | ULVOIL D-11 | ||||||||||
| Oil capacity(L) | 5 | 13 | 27 | ||||||||
| Cooling water temperature(℃) | 19～25℃ | ||||||||||
| Water connections | Rc 1/2×2 | Rc 1/2×2 | Rc 1/2×4 Rc 3/8×2 | ||||||||
| Water capacity(L/min) | 12 | 38 | 50 | ||||||||
| Voltage | 200V / 3φ | ||||||||||
| Pump power(kW) | 8 | Start-Up 22 Normal 11 | Start-Up 45 Normal 30 | ||||||||
| Heater type | colled element | colled element | colled element | ||||||||
| Standard backing pump*2 | PMB-040C＋PKS-070 (PMB1200D＋PKS-030) | PMB-040C＋PKS-070 (PMB1200D＋PKS-070) (PMB2400D＋PKS-070) | PMB-060C＋PKS-070×2台 PMB2400D＋PKS-070 | ||||||||
| Dimensions(mm)*3 | A | 480 | 725 | 1000 | |||||||
| B | 630 | 1022 | 2000 | ||||||||
| H | 1330 | 1732 | 2845 | ||||||||
| Inlet | VG550 | VG900 | VG52相当inch | ||||||||
| Outlet | VG150 | VG250 | VG350 | ||||||||
| Weight(kg) | 290 | 650 | 1400 | ||||||||
| Oil level gage | ビューポート | ビューポート | ビューポート | ||||||||
| Themal switch option | 有り | 有り | 有り | ||||||||
| Themal switch operating temperature(℃) | 180 | 110 | 110 | ||||||||
| Model | BW-22 | BW-36 | BW-52 | ||||||||
| Conductance(L/sec) | 14000 | 54000 | 75000 | ||||||||
| Dimensions [mm] | D | φ680 | φ1065 | φ1480 | |||||||
| T | 101 | 113 | 165 | ||||||||
| t | 26 | 28 | 35 | ||||||||
| Water connections | Rc 3/8 | Rc 3/8 | Rc 1/2 | ||||||||
| Water capacity [L/min] | 3 | 5 | 5 | ||||||||
| Weight [kg] | 28 | 66 | 200 | ||||||||
*1 The ultimate pressure by an ionization gauge in the case of coolant temperature 20 degrees Ceisius.
*2 The backing pump chooses it for the maximum throughput of the diffusion ejector pump,but,in consideration of time of starting pressure,it is good to use a big backing pump.
*3 Please confirm other dimensions by CAD data placing in the ULVAC,Inc.website.
| Model | ULK-04A | ULK-06A | ULK-10A | ULK-14A | |||||
| Pumping speed(L/sec) | 550 | 500 | 1200 | 1100 | 3400 | 3000 | 5400 | 4900 | |
| Ultimate pressure(Pa)*1 | ＜2.6×10-5 | ＜2.6×10-6 | ＜2.6×10-5 | ＜2.6×10-6 | ＜2.6×10-5 | ＜2.6×10-6 | ＜2.6×10-5 | ＜2.6×10-6 | |
| Maxium forepressure(Pa) | 40 | 60 | 40 | 60 | 35 | 40 | 30 | 30 | |
| Heating up time(min) | 9 | 8.5 | 16.5 | 15 | 20 | 20 | 25 | 25 | |
| Oil*4 | ULVOIL D-11 | ULVOIL D-31 | ULVOIL D-11 | ULVOIL D-31 | ULVOIL D-11 | ULVOIL D-31 | ULVOIL D-11 | ULVOIL D-31 | |
| Oil capacity(L) | 0.15 | 0.35 | 0.8 | 1.5 | |||||
| Cooling water temperature(℃) | 19℃～25℃ | ||||||||
| Water connections | Rc 1/4″ | Rc 1/4″ | Rc 3/8″ | Rc 3/8″ | |||||
| Water capacity(L／min) | 1 | 1 | 1 | 1.5 | 2.5 | 3 | 2.5 | 3.5 | |
| Voltage | 200V/1Φ | ||||||||
| Pump power(kW) | 0.55 | 0.73 | 0.9 | 1.2 | 2 | 2.4 | 2.25 | 2.4 | |
| Heater type | Plate | Plate | Plate | Plate | |||||
| Standard backing pump*2 | VD151/VD201 PVD-180/PVD-360 | VD30C/VD40C/VD60C | VD90C VS1501 PKS-016/PKS-030 | VS1501/VS2401/PKS-030 | |||||
| Dimensions*3(mm) | A | 175 | 250 | 340 | 340 | ||||
| B | 150 | 180 | 240 | 240 | |||||
| H | 344 | 449 | 650 | 670 | |||||
| Inlet | VG100 | VG150 | VG250 | VG350 | |||||
| Outlet | VG25 | VG40 | VG80 | VG80 | |||||
| Weight(kg) | 7.5 | 13.5 | 47 | 56 | |||||
| Oil level gage | Without | Without | Slight glass | Slight glass | |||||
| Themal switch option | With | With | With | With | |||||
| Themal switch operating temperature(℃) | 250 | 250 | 180 | 180 | |||||
*1 The ultimate pressure by an ionization gauge in the case of coolant temperature 20 degrees Ceisius.
*2 The backing pump chooses it for the maximum throughput of the diffusion ejector pump,but,in consideration of time of starting pressure,it is good to use a big backing pump.
*3 Please confirm other dimensions by CAD data placing in the ULVAC,Inc.website.
*4 D-11 is hydrocarbon-based general-purpose oil.D-31 is the silicon-based diffusion pump oil which heat-resistant stability is high in.