By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops.
These pumps use no oil in the pumping chamber resulting in stable performance even when evacuating water vapor or solvent vapors.
| Model | PMB-040C | PMB-060C | |
| Actual pumping speed *1 | 50Hz | 3800m3/h (63300L/min) | 6200m3/h (103300L/min) |
| 60Hz | |||
| Maximum suction pressure | 50Hz | 8.0 x 102Pa | |
| 60Hz | |||
| Ultimate pressure *2 | 6.7 x 10-1Pa | ||
| Allowable drive pressure | 1.0 x 10-3Pa | ||
| Motor (number of poles) *3 | 15kW (4P) | 18.5kW (4P) | |
| Oil *4 | ULVOIL R-7 | ||
| Oil capacity | 8.0L | ||
| Cooling water | Cooling method | Water cooling | |
| Primary side pressure | 0.1～0.3MPa | ||
| Inlet/outlet differential pressure | 0.05MPa | ||
| Cooling water volume | 10L/min | ||
| Cooling water temperature | 5 to 30℃ | ||
| Suction diameter JIS B 2290 | Corresponds to VG250 | Corresponds to VG300 | |
| Exhaust port diameter JIS B 2290 | Equivalent to VF150 | Equivalent to VF200 | |
| External dimensions L x W x H *5 | 772 x 1182 x 680mm | 772 x 1452 x 680mm | |
| Weight | 970kg (without motor) | 1100kg (without motor) | |
| Standard backing pump | PKS-070 | PKS-070 x 2 | |
Note) SI units are used in this specification. The following conversion can be used for non-SI units.
Ultimate pressure：6.7×10-1 Pa = 5×10-3 Torr,
Pressure：0.05/0.1/0.2/0.3 Mpa = ~0.5/0.1/2/3 atmospheres
*1 Measured value at 13 Pa
*2 Measured by pirani vacuum gauge (with standard backing pump and oil).
The value would be 6.7 x 10-2 Pa when measured with a McLeod vacuum gauge.
*3 00 VAC 50/60 Hz; 200 VAC 60 Hz; 3-phase
*4 Pump oil types other than the standard type are available. Contact ULVAC.
*5 W = width, D = depth, H = height