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High-temp Ion Implanter for SiC

IH-860DSIC Series

Ion Implanter for mass production with high temp ESC for SiC.

 
 

features

  • Continuous high-temp implantation
  • Up to 700keV
  • Chain implantation by software
  • Small footprint
  • From R&D to mass production

applications

  • SiC devices
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Company Profile
Sells and provides customer support for vacuum equipments and components
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contact us

ULVAC Singapore Pte.Ltd.
India Branch
301, Tara Tycoon 12-13-97, Tarnaka Secunderabad – 500 017, India
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